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مکانیک::
میکرو ماشینکاری سطحی
The pump has check valves made of polysilicon by using surface micromachining.
The peristaltic pump shown in Figure 7-28( b) utilizes surface micromachining and electro-
Jun and Kim [89] fabricated a much smaller pump based on surface micromachining.
The two membranes in Figure 6.18( c) are fabricated with polymeric surface micromachining (see Section 3.4), A 30-|Ltm-thick silicone rubber layer works as the structural material, while thick positive photoresists work as sacrificial layers.
healer is made of sputtered Cr/Au, This actuator allows 2- jim deflection at a 50-m\V heating power The valve seat and channel structures are fabricated with surface micromachining.
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